Aluminum prototype for stamper and manufacturing method thereof, stamper and manufacturing method thereof, manufacturing method of article, and anti-reflective product
In an aluminum prototype which is used in manufacturing a stamper that has a fine concave-convex structure thereof and which contains aluminum and magnesium, the aluminum prototype for the stamper is used, in which the amount of the magnesium is 0.1% by mass to 3% by mass, the amount of silicon is 1...
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| creator | KOJIMA, KATSUHIRO MOCHIZUKI, KAZUME ONOMOTO, HIROSHI SHIRAI, KOTA OKADA, HIROSHI KITA, HIROAKI |
| description | In an aluminum prototype which is used in manufacturing a stamper that has a fine concave-convex structure thereof and which contains aluminum and magnesium, the aluminum prototype for the stamper is used, in which the amount of the magnesium is 0.1% by mass to 3% by mass, the amount of silicon is 100 ppm by mass or less, the total amount of other elements excluding the aluminum and the magnesium is 500 ppm by mass or less, and the number of magnesium silicides having the projected area diameter of 10 nm or greater is 10 or less per 1000 m2 in a surface of the aluminum prototype for the stamper. |
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; CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS ANDNON-FERROUS ALLOYS ; CHEMISTRY ; ELECTROFORMING ; ELECTROLYTIC OR ELECTROPHORETIC PROCESSES ; FERROUS OR NON-FERROUS ALLOYS ; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC ; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS ; INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULARARTICLES ; METALLURGY ; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS ; OPTICS ; PERFORMING OPERATIONS ; PHYSICS ; POWDER METALLURGY ; PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS ; PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCESIN A PLASTIC STATE ; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR ; SHAPING OR JOINING OF PLASTICS ; TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION ; TECHNICAL SUBJECTS COVERED BY FORMER USPC ; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS ; TRANSPORTING ; 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contains aluminum and magnesium, the aluminum prototype for the stamper is used, in which the amount of the magnesium is 0.1% by mass to 3% by mass, the amount of silicon is 100 ppm by mass or less, the total amount of other elements excluding the aluminum and the magnesium is 500 ppm by mass or less, and the number of magnesium silicides having the projected area diameter of 10 nm or greater is 10 or less per 1000 m2 in a surface of the aluminum prototype for the stamper.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING ALLOYS APPARATUS THEREFOR CASTING CASTING OF METALS CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS ANDNON-FERROUS ALLOYS CHEMISTRY ELECTROFORMING ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FERROUS OR NON-FERROUS ALLOYS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULARARTICLES METALLURGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS POWDER METALLURGY PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCESIN A PLASTIC STATE SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TRANSPORTING TREATMENT OF ALLOYS OR NON-FERROUS METALS WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL |
| title | Aluminum prototype for stamper and manufacturing method thereof, stamper and manufacturing method thereof, manufacturing method of article, and anti-reflective product |
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