Modular filtration system

The present disclosure relates to modular filtration systems using removable filter cassettes for filtering liquids including, for example, liquids used in semiconductor manufacturing. A filtration system may include a removable filter cassette having a filter inlet port and a filter outlet port, a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	PUGLIA, JOHN P, LOWE, CHRISTOPHER JOHN, LEE, BEN MAI PAK, BARROWS, LOUIS JR, LAVERDIERE, MARC
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION TRANSPORTING
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