Pre-irradiation in gas discharge lasing devices using multiple pre-irradiation discharges per electrical feed-through

A pre-irradiation system and method may be used in a gas discharge lasing device to provide multiple ultraviolet (UV) pre-irradiation discharges per electrical feed-through into a gas discharge chamber of the lasing device. One or more high-voltage electrical feed-throughs are electrically connected...

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Bibliographische Detailangaben
Hauptverfasser: JENKET, BRUCE R, SERCEL, JEFFREY P, DADELSZEN, MICHAEL VON, MASSE, DANIEL B, SERCEL, DANA K
Format: Patent
Sprache:chi ; eng
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