Modular filter cassette

The present disclosure relates to modular filtration cassettes for filtering liquids including, for example, liquids used in semiconductor manufacturing. A filter housing may define a filter cavity comprising an upstream portion and a downstream portion. The filter may further comprise a filter elem...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	PUGLIA, JOHN P, LOWE, CHRISTOPHER JOHN, LEE, BEN MAI PAK, BARROWS, LOUIS JR, LAVERDIERE, MARC
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION TRANSPORTING
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