Modular filter cassette

Modular filter cassette

The present disclosure relates to modular filtration cassettes for filtering liquids including, for example, liquids used in semiconductor manufacturing. A filter housing may define a filter cavity comprising an upstream portion and a downstream portion. The filter may further comprise a filter elem...

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Hauptverfasser: PUGLIA, JOHN P, LOWE, CHRISTOPHER JOHN, LEE, BEN MAI PAK, BARROWS, LOUIS JR, LAVERDIERE, MARC
Format: Patent
Sprache:chi ; eng
Schlagworte:
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SEPARATION
TRANSPORTING
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creator PUGLIA, JOHN P
LOWE, CHRISTOPHER JOHN
LEE, BEN MAI PAK
BARROWS, LOUIS JR
LAVERDIERE, MARC
description The present disclosure relates to modular filtration cassettes for filtering liquids including, for example, liquids used in semiconductor manufacturing. A filter housing may define a filter cavity comprising an upstream portion and a downstream portion. The filter may further comprise a filter element disposed in the filter cavity. The filter element may at least partially overlap the filter inlet on a first side of the filter element. The filter element may comprise a rectangular pleated filter with a set of pleats having a first set of pleat tips on an upstream side of the filter element and a second set of pleat tips on a downstream side of the pleated filter.
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subjects PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SEPARATION
TRANSPORTING
title Modular filter cassette
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