Vibration-actuated micro mirror device
The present invention provides a vibration-actuated micro mirror device comprising a substrate having a first and a second reflection mirrors, and a vibration part having a first and a second vibration structures coupled to the substrate, wherein the first vibration structure is driven to generate a...
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| Hauptverfasser: | , , , |
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The present invention provides a vibration-actuated micro mirror device comprising a substrate having a first and a second reflection mirrors, and a vibration part having a first and a second vibration structures coupled to the substrate, wherein the first vibration structure is driven to generate a first complex wave formed by a first and a second vibration modes having the same frequency and phase while the second vibration structure is driven to generate a second complex wave formed by a third and a fourth vibration modes having the same frequency and opposite phases. The first and the second complex waves actuate the substrate such that the first reflection mirror is rotated about a first axis while the second reflection mirror is rotated about a second axis. |
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