Techniques for improving extracted ion beam quality using high-transparency electrodes

Techniques for improving extracted ion beam quality using high-transparency electrodes are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for ion implantation. The apparatus may comprise an ion source for generating an ion beam, wherein the ion sour...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SINCLAIR, FRANK, PLATOW, WILHELM, PURSER, KENNETH H, PATEL, SHARDUL, BUFF, JAMES, CHANEY, CRAIG R, KOO, BON-WOONG, LISCHER, D. JEFFREY, MAYUR, JAGTAP, RADOVANOV, SVETLANA, COBB, ERIC R, BENVENISTE, VICTOR M, BORICHEVSKY, STEVEN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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