Techniques for improving extracted ion beam quality using high-transparency electrodes
Techniques for improving extracted ion beam quality using high-transparency electrodes are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for ion implantation. The apparatus may comprise an ion source for generating an ion beam, wherein the ion sour...
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| creator | SINCLAIR, FRANK PLATOW, WILHELM PURSER, KENNETH H PATEL, SHARDUL BUFF, JAMES CHANEY, CRAIG R KOO, BON-WOONG LISCHER, D. JEFFREY MAYUR, JAGTAP RADOVANOV, SVETLANA COBB, ERIC R BENVENISTE, VICTOR M BORICHEVSKY, STEVEN |
| description | Techniques for improving extracted ion beam quality using high-transparency electrodes are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for ion implantation. The apparatus may comprise an ion source for generating an ion beam, wherein the ion source comprises a faceplate with an aperture for the ion beam to travel therethrough. The apparatus may also comprise a set of extraction electrodes comprising at least a suppression electrode and a high-transparency ground electrode, wherein the set of extraction electrodes may extract the ion beam from the ion source via the faceplate, and wherein the high-transparency ground electrode may be configured to optimize gas conductance between the suppression electrode and the high-transparency ground electrode for improved extracted ion beam quality. |
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JEFFREY ; MAYUR, JAGTAP ; RADOVANOV, SVETLANA ; COBB, ERIC R ; BENVENISTE, VICTOR M ; BORICHEVSKY, STEVEN</creator><creatorcontrib>SINCLAIR, FRANK ; PLATOW, WILHELM ; PURSER, KENNETH H ; PATEL, SHARDUL ; BUFF, JAMES ; CHANEY, CRAIG R ; KOO, BON-WOONG ; LISCHER, D. JEFFREY ; MAYUR, JAGTAP ; RADOVANOV, SVETLANA ; COBB, ERIC R ; BENVENISTE, VICTOR M ; BORICHEVSKY, STEVEN</creatorcontrib><description>Techniques for improving extracted ion beam quality using high-transparency electrodes are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for ion implantation. The apparatus may comprise an ion source for generating an ion beam, wherein the ion source comprises a faceplate with an aperture for the ion beam to travel therethrough. The apparatus may also comprise a set of extraction electrodes comprising at least a suppression electrode and a high-transparency ground electrode, wherein the set of extraction electrodes may extract the ion beam from the ion source via the faceplate, and wherein the high-transparency ground electrode may be configured to optimize gas conductance between the suppression electrode and the high-transparency ground electrode for improved extracted ion beam quality.</description><language>chi ; eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRICITY</subject><creationdate>2011</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20110316&DB=EPODOC&CC=TW&NR=201110183A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76293</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20110316&DB=EPODOC&CC=TW&NR=201110183A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>SINCLAIR, FRANK</creatorcontrib><creatorcontrib>PLATOW, WILHELM</creatorcontrib><creatorcontrib>PURSER, KENNETH H</creatorcontrib><creatorcontrib>PATEL, SHARDUL</creatorcontrib><creatorcontrib>BUFF, JAMES</creatorcontrib><creatorcontrib>CHANEY, CRAIG R</creatorcontrib><creatorcontrib>KOO, BON-WOONG</creatorcontrib><creatorcontrib>LISCHER, D. 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The apparatus may also comprise a set of extraction electrodes comprising at least a suppression electrode and a high-transparency ground electrode, wherein the set of extraction electrodes may extract the ion beam from the ion source via the faceplate, and wherein the high-transparency ground electrode may be configured to optimize gas conductance between the suppression electrode and the high-transparency ground electrode for improved extracted ion beam quality.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRICITY</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2011</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNyz8KwjAYh-EsDqLe4fMAhcYuriKKBwg6lpj-2gTSJM0fsbe3ggdwepfnXbO7gNLOTAWJeh_JjCH6l3ED4Z2jVBkdGe_oCTnSVKQ1eaaSvkCbQVeLcSnICKdmgoXK0XdIW7bqpU3Y_bph--tFnG8Vgm-xDAoOuRWPQ805r_mxOTX_mA-ReTqN</recordid><startdate>20110316</startdate><enddate>20110316</enddate><creator>SINCLAIR, FRANK</creator><creator>PLATOW, WILHELM</creator><creator>PURSER, KENNETH H</creator><creator>PATEL, SHARDUL</creator><creator>BUFF, JAMES</creator><creator>CHANEY, CRAIG R</creator><creator>KOO, BON-WOONG</creator><creator>LISCHER, D. 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JEFFREY</creatorcontrib><creatorcontrib>MAYUR, JAGTAP</creatorcontrib><creatorcontrib>RADOVANOV, SVETLANA</creatorcontrib><creatorcontrib>COBB, ERIC R</creatorcontrib><creatorcontrib>BENVENISTE, VICTOR M</creatorcontrib><creatorcontrib>BORICHEVSKY, STEVEN</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>SINCLAIR, FRANK</au><au>PLATOW, WILHELM</au><au>PURSER, KENNETH H</au><au>PATEL, SHARDUL</au><au>BUFF, JAMES</au><au>CHANEY, CRAIG R</au><au>KOO, BON-WOONG</au><au>LISCHER, D. JEFFREY</au><au>MAYUR, JAGTAP</au><au>RADOVANOV, SVETLANA</au><au>COBB, ERIC R</au><au>BENVENISTE, VICTOR M</au><au>BORICHEVSKY, STEVEN</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Techniques for improving extracted ion beam quality using high-transparency electrodes</title><date>2011-03-16</date><risdate>2011</risdate><abstract>Techniques for improving extracted ion beam quality using high-transparency electrodes are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for ion implantation. The apparatus may comprise an ion source for generating an ion beam, wherein the ion source comprises a faceplate with an aperture for the ion beam to travel therethrough. The apparatus may also comprise a set of extraction electrodes comprising at least a suppression electrode and a high-transparency ground electrode, wherein the set of extraction electrodes may extract the ion beam from the ion source via the faceplate, and wherein the high-transparency ground electrode may be configured to optimize gas conductance between the suppression electrode and the high-transparency ground electrode for improved extracted ion beam quality.</abstract><oa>free_for_read</oa></addata></record> |
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| title | Techniques for improving extracted ion beam quality using high-transparency electrodes |
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