Paste coating device and coating method
For large-sized substrate, this invention can realize miniaturization and weight lightening of the substrate holding mechanism, and can realized the weight lightening of the whole device including the frame. The substrate holding mechanism (8) for carrying the substrate disposed on the frame (1) (Fi...
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| creator | MAEHARA, SHINJI KAMIO, MASANOBU UCHIMURA, MICHIYUKI |
| description | For large-sized substrate, this invention can realize miniaturization and weight lightening of the substrate holding mechanism, and can realized the weight lightening of the whole device including the frame. The substrate holding mechanism (8) for carrying the substrate disposed on the frame (1) (Fig. 1) is characterized in that plate-shaped absorbing sheets (34a-34e) are disposed on U-shaped members (33a-33e) to construct the substrate carrying members (32a-32e); a plurality of substrate carrying members (32a-32e) are disposed at a fixed interval in the X-axis direction; a plurality of connecting members (35a-35d) orthogonal to the substrate carrying members and disposed at a fixed interval are connected to the underside of the substrate carrying members (32a-32e); and the substrate carrying members (32a-32e) and the connecting members (35a-35d) are used to construct the grid-shaped carrying platform. Absorbing sheets (34a-34e) are provided thereon with absorbing holes to form the carrying face for the subst |
| format | Patent |
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The substrate holding mechanism (8) for carrying the substrate disposed on the frame (1) (Fig. 1) is characterized in that plate-shaped absorbing sheets (34a-34e) are disposed on U-shaped members (33a-33e) to construct the substrate carrying members (32a-32e); a plurality of substrate carrying members (32a-32e) are disposed at a fixed interval in the X-axis direction; a plurality of connecting members (35a-35d) orthogonal to the substrate carrying members and disposed at a fixed interval are connected to the underside of the substrate carrying members (32a-32e); and the substrate carrying members (32a-32e) and the connecting members (35a-35d) are used to construct the grid-shaped carrying platform. 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| subjects | APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL ATOMISING APPARATUS NOZZLES PERFORMING OPERATIONS SPRAYING APPARATUS SPRAYING OR ATOMISING IN GENERAL TRANSPORTING |
| title | Paste coating device and coating method |
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