Laser scribing platform with moving gantry

Laser scribing can be performed on a workpiece (220, 340) such as a substrate with layers formed thereon for use in a solar cell without need to move the workpiece (220, 340) during the scribing process. A series of lasers (230, 570) can be used to concurrently remove material from multiple position...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MANTEL, NICOLAS, BEE, DUNCAN, SYKES, NEIL, ELLINER, GRAEME, GRUNEWALD, PHILIPP, ALEXANDER, CLIVE, BANN, ROBERT
Format: Patent
Sprache:chi ; eng
Schlagworte:
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