System for purging reticle storage
The present invention provides a method, system, and components for protecting reticles and specifically for minimizing haze formation on reticles during storage and use. By substantially continually maintaining a purge in a storage housing having a reduced humidity level on reticles or by temporari...
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| creator | KISHKOVICH, OLEG P SCOGGINS, TROY GABARRE, XAVIER LO, JAMES GOODWIN, WILLIAM M |
| description | The present invention provides a method, system, and components for protecting reticles and specifically for minimizing haze formation on reticles during storage and use. By substantially continually maintaining a purge in a storage housing having a reduced humidity level on reticles or by temporarily storing the reticle in a container in proximity to a desiccant or getter when not being purged, haze formation can be eliminated, minimized, or sufficiently controlled. Moreover, a filter media in the container may be positioned to be "recharged" during the substantially continual purging of the reticle, a reduced desireable humidity level can be readily maintained in the reticle container when the container is not currently being purged. Additionally, the system of the invention can comprise an ionizer associated with the purge system. For example, the ionizer can be associated with at least one of the plurality of purge lines of the purge system. The system of the invention can also include a purge gas source |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_TW200817252A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>TW200817252A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_TW200817252A3</originalsourceid><addsrcrecordid>eNrjZFAKriwuSc1VSMsvUigoLUrPzEtXKEotyUzOSVUoLskvSkxP5WFgTUvMKU7lhdLcDIpuriHOHrqpBfnxqcUFicmpeakl8SHhRgYGFobmRqZGjsbEqAEAx38mWA</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>System for purging reticle storage</title><source>esp@cenet</source><creator>KISHKOVICH, OLEG P ; SCOGGINS, TROY ; GABARRE, XAVIER ; LO, JAMES ; GOODWIN, WILLIAM M</creator><creatorcontrib>KISHKOVICH, OLEG P ; SCOGGINS, TROY ; GABARRE, XAVIER ; LO, JAMES ; GOODWIN, WILLIAM M</creatorcontrib><description>The present invention provides a method, system, and components for protecting reticles and specifically for minimizing haze formation on reticles during storage and use. By substantially continually maintaining a purge in a storage housing having a reduced humidity level on reticles or by temporarily storing the reticle in a container in proximity to a desiccant or getter when not being purged, haze formation can be eliminated, minimized, or sufficiently controlled. Moreover, a filter media in the container may be positioned to be "recharged" during the substantially continual purging of the reticle, a reduced desireable humidity level can be readily maintained in the reticle container when the container is not currently being purged. Additionally, the system of the invention can comprise an ionizer associated with the purge system. For example, the ionizer can be associated with at least one of the plurality of purge lines of the purge system. The system of the invention can also include a purge gas source</description><language>chi ; eng</language><subject>ACCESSORIES THEREFOR ; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR ; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES ; APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM ; BLASTING ; CINEMATOGRAPHY ; CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS ; CONVEYING ; DRYING ; DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM ; ELECTROGRAPHY ; HANDLING THIN OR FILAMENTARY MATERIAL ; HEATING ; HOLOGRAPHY ; LIGHTING ; MECHANICAL ENGINEERING ; PACKAGES ; PACKAGING ELEMENTS ; PACKING ; PERFORMING OPERATIONS ; PHOTOGRAPHY ; PHYSICS ; STORING ; TRANSPORTING ; WEAPONS</subject><creationdate>2008</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20080416&DB=EPODOC&CC=TW&NR=200817252A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20080416&DB=EPODOC&CC=TW&NR=200817252A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>KISHKOVICH, OLEG P</creatorcontrib><creatorcontrib>SCOGGINS, TROY</creatorcontrib><creatorcontrib>GABARRE, XAVIER</creatorcontrib><creatorcontrib>LO, JAMES</creatorcontrib><creatorcontrib>GOODWIN, WILLIAM M</creatorcontrib><title>System for purging reticle storage</title><description>The present invention provides a method, system, and components for protecting reticles and specifically for minimizing haze formation on reticles during storage and use. By substantially continually maintaining a purge in a storage housing having a reduced humidity level on reticles or by temporarily storing the reticle in a container in proximity to a desiccant or getter when not being purged, haze formation can be eliminated, minimized, or sufficiently controlled. Moreover, a filter media in the container may be positioned to be "recharged" during the substantially continual purging of the reticle, a reduced desireable humidity level can be readily maintained in the reticle container when the container is not currently being purged. Additionally, the system of the invention can comprise an ionizer associated with the purge system. For example, the ionizer can be associated with at least one of the plurality of purge lines of the purge system. The system of the invention can also include a purge gas source</description><subject>ACCESSORIES THEREFOR</subject><subject>ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR</subject><subject>APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES</subject><subject>APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM</subject><subject>BLASTING</subject><subject>CINEMATOGRAPHY</subject><subject>CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS</subject><subject>CONVEYING</subject><subject>DRYING</subject><subject>DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM</subject><subject>ELECTROGRAPHY</subject><subject>HANDLING THIN OR FILAMENTARY MATERIAL</subject><subject>HEATING</subject><subject>HOLOGRAPHY</subject><subject>LIGHTING</subject><subject>MECHANICAL ENGINEERING</subject><subject>PACKAGES</subject><subject>PACKAGING ELEMENTS</subject><subject>PACKING</subject><subject>PERFORMING OPERATIONS</subject><subject>PHOTOGRAPHY</subject><subject>PHYSICS</subject><subject>STORING</subject><subject>TRANSPORTING</subject><subject>WEAPONS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2008</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZFAKriwuSc1VSMsvUigoLUrPzEtXKEotyUzOSVUoLskvSkxP5WFgTUvMKU7lhdLcDIpuriHOHrqpBfnxqcUFicmpeakl8SHhRgYGFobmRqZGjsbEqAEAx38mWA</recordid><startdate>20080416</startdate><enddate>20080416</enddate><creator>KISHKOVICH, OLEG P</creator><creator>SCOGGINS, TROY</creator><creator>GABARRE, XAVIER</creator><creator>LO, JAMES</creator><creator>GOODWIN, WILLIAM M</creator><scope>EVB</scope></search><sort><creationdate>20080416</creationdate><title>System for purging reticle storage</title><author>KISHKOVICH, OLEG P ; SCOGGINS, TROY ; GABARRE, XAVIER ; LO, JAMES ; GOODWIN, WILLIAM M</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_TW200817252A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2008</creationdate><topic>ACCESSORIES THEREFOR</topic><topic>ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR</topic><topic>APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES</topic><topic>APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM</topic><topic>BLASTING</topic><topic>CINEMATOGRAPHY</topic><topic>CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS</topic><topic>CONVEYING</topic><topic>DRYING</topic><topic>DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM</topic><topic>ELECTROGRAPHY</topic><topic>HANDLING THIN OR FILAMENTARY MATERIAL</topic><topic>HEATING</topic><topic>HOLOGRAPHY</topic><topic>LIGHTING</topic><topic>MECHANICAL ENGINEERING</topic><topic>PACKAGES</topic><topic>PACKAGING ELEMENTS</topic><topic>PACKING</topic><topic>PERFORMING OPERATIONS</topic><topic>PHOTOGRAPHY</topic><topic>PHYSICS</topic><topic>STORING</topic><topic>TRANSPORTING</topic><topic>WEAPONS</topic><toplevel>online_resources</toplevel><creatorcontrib>KISHKOVICH, OLEG P</creatorcontrib><creatorcontrib>SCOGGINS, TROY</creatorcontrib><creatorcontrib>GABARRE, XAVIER</creatorcontrib><creatorcontrib>LO, JAMES</creatorcontrib><creatorcontrib>GOODWIN, WILLIAM M</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>KISHKOVICH, OLEG P</au><au>SCOGGINS, TROY</au><au>GABARRE, XAVIER</au><au>LO, JAMES</au><au>GOODWIN, WILLIAM M</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>System for purging reticle storage</title><date>2008-04-16</date><risdate>2008</risdate><abstract>The present invention provides a method, system, and components for protecting reticles and specifically for minimizing haze formation on reticles during storage and use. By substantially continually maintaining a purge in a storage housing having a reduced humidity level on reticles or by temporarily storing the reticle in a container in proximity to a desiccant or getter when not being purged, haze formation can be eliminated, minimized, or sufficiently controlled. Moreover, a filter media in the container may be positioned to be "recharged" during the substantially continual purging of the reticle, a reduced desireable humidity level can be readily maintained in the reticle container when the container is not currently being purged. Additionally, the system of the invention can comprise an ionizer associated with the purge system. For example, the ionizer can be associated with at least one of the plurality of purge lines of the purge system. The system of the invention can also include a purge gas source</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
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| subjects | ACCESSORIES THEREFOR ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM BLASTING CINEMATOGRAPHY CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS CONVEYING DRYING DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM ELECTROGRAPHY HANDLING THIN OR FILAMENTARY MATERIAL HEATING HOLOGRAPHY LIGHTING MECHANICAL ENGINEERING PACKAGES PACKAGING ELEMENTS PACKING PERFORMING OPERATIONS PHOTOGRAPHY PHYSICS STORING TRANSPORTING WEAPONS |
| title | System for purging reticle storage |
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