Semiconductor devices having different gate dielectrics and methods for manufacturing the same

A semiconductor device includes first and second transistor devices. The first device includes a first substrate region, a first gate electrode, and a first gate dielectric. The first gate dielectric is located between the first substrate region and the first gate electrode. The second device includ...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: LEE, JONG-HO, KANG, HO-KYU, KIM, YUN-SEOK, JUNG, HYUNG-SUK, DOH, SEOK-JO
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator LEE, JONG-HO
KANG, HO-KYU
KIM, YUN-SEOK
JUNG, HYUNG-SUK
DOH, SEOK-JO
description A semiconductor device includes first and second transistor devices. The first device includes a first substrate region, a first gate electrode, and a first gate dielectric. The first gate dielectric is located between the first substrate region and the first gate electrode. The second device includes a second substrate region, a second gate electrode, and a second gate dielectric. The second gate dielectric is located between the second substrate region and the second gate electrode. The first gate dielectric includes a first high-k layer having a dielectric constant of 8 or more. Likewise, the second gate dielectric includes a second high-k layer having a dielectric constant of 8 or more. The second high-k layer has a different material composition than the first high-k layer.
format Patent
fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_TW200524013A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>TW200524013A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_TW200524013A3</originalsourceid><addsrcrecordid>eNqNi0EKwjAQRbtxIeodxgMItdUDiCjuLbizDJOfNtAkJZn2_FbwAK4eD95bF-8nvJMYzCQaExnMTpCp59mFjoyzFglBqWPFohggmpxk4mDIQ_toMtnl9Bwmy6JT-o7agzJ7bIuV5SFj9-Om2N9vzfVxwBhb5JEFAdo2r6osz9WpPNaX-p_mA43XPSY</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Semiconductor devices having different gate dielectrics and methods for manufacturing the same</title><source>esp@cenet</source><creator>LEE, JONG-HO ; KANG, HO-KYU ; KIM, YUN-SEOK ; JUNG, HYUNG-SUK ; DOH, SEOK-JO</creator><creatorcontrib>LEE, JONG-HO ; KANG, HO-KYU ; KIM, YUN-SEOK ; JUNG, HYUNG-SUK ; DOH, SEOK-JO</creatorcontrib><description>A semiconductor device includes first and second transistor devices. The first device includes a first substrate region, a first gate electrode, and a first gate dielectric. The first gate dielectric is located between the first substrate region and the first gate electrode. The second device includes a second substrate region, a second gate electrode, and a second gate dielectric. The second gate dielectric is located between the second substrate region and the second gate electrode. The first gate dielectric includes a first high-k layer having a dielectric constant of 8 or more. Likewise, the second gate dielectric includes a second high-k layer having a dielectric constant of 8 or more. The second high-k layer has a different material composition than the first high-k layer.</description><language>chi ; eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; SEMICONDUCTOR DEVICES</subject><creationdate>2005</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20050716&amp;DB=EPODOC&amp;CC=TW&amp;NR=200524013A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20050716&amp;DB=EPODOC&amp;CC=TW&amp;NR=200524013A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>LEE, JONG-HO</creatorcontrib><creatorcontrib>KANG, HO-KYU</creatorcontrib><creatorcontrib>KIM, YUN-SEOK</creatorcontrib><creatorcontrib>JUNG, HYUNG-SUK</creatorcontrib><creatorcontrib>DOH, SEOK-JO</creatorcontrib><title>Semiconductor devices having different gate dielectrics and methods for manufacturing the same</title><description>A semiconductor device includes first and second transistor devices. The first device includes a first substrate region, a first gate electrode, and a first gate dielectric. The first gate dielectric is located between the first substrate region and the first gate electrode. The second device includes a second substrate region, a second gate electrode, and a second gate dielectric. The second gate dielectric is located between the second substrate region and the second gate electrode. The first gate dielectric includes a first high-k layer having a dielectric constant of 8 or more. Likewise, the second gate dielectric includes a second high-k layer having a dielectric constant of 8 or more. The second high-k layer has a different material composition than the first high-k layer.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2005</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNi0EKwjAQRbtxIeodxgMItdUDiCjuLbizDJOfNtAkJZn2_FbwAK4eD95bF-8nvJMYzCQaExnMTpCp59mFjoyzFglBqWPFohggmpxk4mDIQ_toMtnl9Bwmy6JT-o7agzJ7bIuV5SFj9-Om2N9vzfVxwBhb5JEFAdo2r6osz9WpPNaX-p_mA43XPSY</recordid><startdate>20050716</startdate><enddate>20050716</enddate><creator>LEE, JONG-HO</creator><creator>KANG, HO-KYU</creator><creator>KIM, YUN-SEOK</creator><creator>JUNG, HYUNG-SUK</creator><creator>DOH, SEOK-JO</creator><scope>EVB</scope></search><sort><creationdate>20050716</creationdate><title>Semiconductor devices having different gate dielectrics and methods for manufacturing the same</title><author>LEE, JONG-HO ; KANG, HO-KYU ; KIM, YUN-SEOK ; JUNG, HYUNG-SUK ; DOH, SEOK-JO</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_TW200524013A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2005</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>LEE, JONG-HO</creatorcontrib><creatorcontrib>KANG, HO-KYU</creatorcontrib><creatorcontrib>KIM, YUN-SEOK</creatorcontrib><creatorcontrib>JUNG, HYUNG-SUK</creatorcontrib><creatorcontrib>DOH, SEOK-JO</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>LEE, JONG-HO</au><au>KANG, HO-KYU</au><au>KIM, YUN-SEOK</au><au>JUNG, HYUNG-SUK</au><au>DOH, SEOK-JO</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Semiconductor devices having different gate dielectrics and methods for manufacturing the same</title><date>2005-07-16</date><risdate>2005</risdate><abstract>A semiconductor device includes first and second transistor devices. The first device includes a first substrate region, a first gate electrode, and a first gate dielectric. The first gate dielectric is located between the first substrate region and the first gate electrode. The second device includes a second substrate region, a second gate electrode, and a second gate dielectric. The second gate dielectric is located between the second substrate region and the second gate electrode. The first gate dielectric includes a first high-k layer having a dielectric constant of 8 or more. Likewise, the second gate dielectric includes a second high-k layer having a dielectric constant of 8 or more. The second high-k layer has a different material composition than the first high-k layer.</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language chi ; eng
recordid cdi_epo_espacenet_TW200524013A
source esp@cenet
subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Semiconductor devices having different gate dielectrics and methods for manufacturing the same
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-07T00%3A24%3A38IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=LEE,%20JONG-HO&rft.date=2005-07-16&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3ETW200524013A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true