Probe testing structure
A calibration structure for probing devices. A calibration substrate for calibrating a probe comprising: (a) a first conductive member supported by said substrate suitable to be electrically interconnected with a first signal path of said probe; (b) a second conductive member supported by said subst...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | A calibration structure for probing devices. A calibration substrate for calibrating a probe comprising: (a) a first conductive member supported by said substrate suitable to be electrically interconnected with a first signal path of said probe; (b) a second conductive member supported by said substrate suitable to be electrically interconnected with a second signal path of said probe; (c) a third conductive member supported by said substrate suitable to be electrically interconnected with a ground path of said probe; (d) a fourth conductive member supported by said substrate suitable to be electrically interconnected with a first signal path of another probe; (e) a fifth conductive member supported by said substrate suitable to be electrically interconnected with a second signal path of said another probe; (f) a sixth conductive member supported by said substrate suitable to be electrically interconnected with a ground path of said another probe; (g) wherein said third conductive member and said sixth conduc |
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