The real-time adjustable mechanism of the shielding plate in the sputtering vacuum chamber design

A real-time adjustable mechanism of the shielding plate in a sputtering vacuum chamber includes at least a real-time adjustment mechanism separately installed on the two ends of two lateral wheel shaft fastening seats on the left and right sides of a vacuum chamber. The real-time adjustable mechanis...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SHEU, GEENG-JEN, CHANG, JER-RONG, YU, TUAN-JEN, LIU, YUUAN, LIU, CHUNGUNG, HUANG, TAI YUAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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