The real-time adjustable mechanism of the shielding plate in the sputtering vacuum chamber design

A real-time adjustable mechanism of the shielding plate in a sputtering vacuum chamber includes at least a real-time adjustment mechanism separately installed on the two ends of two lateral wheel shaft fastening seats on the left and right sides of a vacuum chamber. The real-time adjustable mechanis...

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Hauptverfasser:	SHEU, GEENG-JEN, CHANG, JER-RONG, YU, TUAN-JEN, LIU, YUUAN, LIU, CHUNGUNG, HUANG, TAI YUAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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creator	SHEU, GEENG-JEN CHANG, JER-RONG YU, TUAN-JEN LIU, YUUAN LIU, CHUNGUNG HUANG, TAI YUAN
description	A real-time adjustable mechanism of the shielding plate in a sputtering vacuum chamber includes at least a real-time adjustment mechanism separately installed on the two ends of two lateral wheel shaft fastening seats on the left and right sides of a vacuum chamber. The real-time adjustable mechanism includes a shielding plate, an elastic component, an adjustment screw, a threaded sleeve, a magnetic fluid rotary introduction terminal, and a scaled sleeve, etc. The shielding plate is mounted between a tray and a wheel shaft and is capable of preventing direct deposition of plating molecules on the bottom of the vacuum chamber and the surface of the transmission mechanism. The elastic component is mounted in a housing recess opening pre-installed on the wheel shaft fastening seat for pushing one end of the shielding plate for an upward or downward displacement. The adjustment screw is mounted on a screw housing recess opening on the wheel shaft fastening seat, in which the upper end and the lower end of the scr
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The real-time adjustable mechanism includes a shielding plate, an elastic component, an adjustment screw, a threaded sleeve, a magnetic fluid rotary introduction terminal, and a scaled sleeve, etc. The shielding plate is mounted between a tray and a wheel shaft and is capable of preventing direct deposition of plating molecules on the bottom of the vacuum chamber and the surface of the transmission mechanism. The elastic component is mounted in a housing recess opening pre-installed on the wheel shaft fastening seat for pushing one end of the shielding plate for an upward or downward displacement. 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language	chi ; eng
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subjects	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
title	The real-time adjustable mechanism of the shielding plate in the sputtering vacuum chamber design
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