INTERFEROMETER FOR CHECKING OBJECT SURFACE LINEARITY AND PLANARITY

FIELD: measuring devices. SUBSTANCE: interferometer has monochromatic light source, telescopic system that functions to extend light beam and incorporates microlens, beam splitter, collimator lens, and beam-splitting grating, planar reflecting grating spaced from beam-splitting one at distance excee...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Myshkina N.E, Seregin A.G, Rassudova G.N, Dukhopel I.I, Serdjuk S.G
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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