OPTICAL TV SYSTEM FOR MASK FLAW DETECTION

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Hauptverfasser:	NIKITINA MAJYA A,SU, LIKARPENKOV VALERIJ G,SU, DULEEV VSEVOLOD V,SU, ASTRATOV OLEG S,SU, VOROBEV LEONID V,SU, MOLCHANOV YURIJ A,SU, RUKOVCHUK VLADIMIR P,SU, VOLKHONSKIJ VIKTOR I,SU
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Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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creator	NIKITINA MAJYA A,SU LIKARPENKOV VALERIJ G,SU DULEEV VSEVOLOD V,SU ASTRATOV OLEG S,SU VOROBEV LEONID V,SU MOLCHANOV YURIJ A,SU RUKOVCHUK VLADIMIR P,SU VOLKHONSKIJ VIKTOR I,SU
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subjects	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
title	OPTICAL TV SYSTEM FOR MASK FLAW DETECTION
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