ELECTROCHEMICAL METHOD OF TEST FOR POROSITY OF THERMALLY GROWN SILICON DIOXIDE FILMS ON SILICON

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Hauptverfasser:	TYAGUSHEVA ELENA G,SU, SHAPOVALOV VITALIJ P,SU, ZAVADOVSKIJ STANISLAV E,SU, YASINSKIJ YULIK A,SU, GORBAN ALEKSANDR N,SU
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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creator	TYAGUSHEVA ELENA G,SU SHAPOVALOV VITALIJ P,SU ZAVADOVSKIJ STANISLAV E,SU YASINSKIJ YULIK A,SU GORBAN ALEKSANDR N,SU
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subjects	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
title	ELECTROCHEMICAL METHOD OF TEST FOR POROSITY OF THERMALLY GROWN SILICON DIOXIDE FILMS ON SILICON
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