DEVICE FOR REMOVING IMPURITY IONS FROM SURFACE OF SEMICONDUCTING STRUCTURE

DEVICE FOR REMOVING IMPURITY IONS FROM SURFACE OF SEMICONDUCTING STRUCTURE

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Hauptverfasser: MIKERTUMYANTS A.R.,SU, ZHURAVLEV B.B.,SU, SEVERTSEV V.N.,SU, SAZONOV YU.P.,SU
Format: Patent
Sprache:eng ; rus
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator MIKERTUMYANTS A.R.,SU
ZHURAVLEV B.B.,SU
SEVERTSEV V.N.,SU
SAZONOV YU.P.,SU
description
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title DEVICE FOR REMOVING IMPURITY IONS FROM SURFACE OF SEMICONDUCTING STRUCTURE
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