WAFER COATING APPARATUS

WAFER COATING APPARATUS

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Hauptverfasser: ISAEV ALEKSANDR F,SU, ROMANOV GENNADIJ P,SU, GRIBOV BORIS G,SU, SHEVYREV YURIJ E,SU, SELIN VIKTOR V,SU, RODIONOV REM A,SU
Format: Patent
Sprache:eng ; rus
Schlagworte:
BASIC ELECTRIC ELEMENTS
CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
PRINTED CIRCUITS
SEMICONDUCTOR DEVICES
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creator ISAEV ALEKSANDR F,SU
ROMANOV GENNADIJ P,SU
GRIBOV BORIS G,SU
SHEVYREV YURIJ E,SU
SELIN VIKTOR V,SU
RODIONOV REM A,SU
description
format Patent
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language eng ; rus
recordid cdi_epo_espacenet_SU1608757A1
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subjects BASIC ELECTRIC ELEMENTS
CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
PRINTED CIRCUITS
SEMICONDUCTOR DEVICES
title WAFER COATING APPARATUS
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