FREE-FORM OPTICAL SURFACE MEASURING APPARATUS AND METHOD

Measuring apparatus for measuring a position of a device (2) that is rotatable relative to a movable stage (3), comprising: a measurement frame (4) and a contactless distance measurement device (5) for measuring in said first direction a distance between said measurement frame and a predetermined me...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HENSELMANS RENS, ROSIELLE PETRUS CAROLUS JOHANNES NICOLAAS
Format:	Patent
Sprache:	eng ; slv
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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