Integrated high-performance decoupling capacitor

An integrated high-performance decoupling capacitor, formed on a semiconductor chip, using the substrate of the chip itself in conjunction with a metallic deposit formed on the presently unused chip back surface and electrically connected to the active chip circuit to result in a significant and ver...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TONTI WILLIAM ROBERT PATRICK, ZALESNSKI JERZY MARIA, BERTIN CLAUDE LOUIS, HOWELL WAYNE JOHN
Format: Patent
Sprache:eng
Schlagworte:
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