End effector and method for loading and unloading disks at a processing station

A robotic end effector for loading and unloading a magnetic information storage circular disk on a grinder or polisher carrier surface includes an effector block, an annular vacuum cup, including vacuum apertures, attached to and extending from the block and a vacuum source for attaching the cup to...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OSHIRO, GEN, E, ALLEN RONALD, FUKUI, KENNETH, D, BAE, PETER, S
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS DRESSING OR CONDITIONING OF ABRADING SURFACES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING INFORMATION STORAGE INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS PHYSICS POLISHING SEMICONDUCTOR DEVICES TRANSPORTING
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