PRE-COATING AND WAFER-LESS AUTO-CLEANING SYSTEM AND METHOD
PRE-COATING AND WAFER-LESS AUTO-CLEANING SYSTEM AND METHODIn a wafer processing system having an electrode, an electrostatic chuck (ESC) and a confinement chamber portion, the ESC is established to be RF-floating, whereas a confinement chamber portion is grounded during a pre-coating process. Accord...
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| Format: | Patent |
| Sprache: | eng |
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