SYSTEM, METHOD AND APPARATUS FOR REAL TIME CONTROL OF RAPID ALTERNATING PROCESSES (RAP)

A rapid alternating process system and method of operating a rapid alternating process system includes a rapid alternating process chamber, a plurality of process gas sources coupled to the rapid alternating process chamber, wherein each one of the plurality of process gas sources includes a corresp...

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Bibliographische Detailangaben

Hauptverfasser:	BRADLEY HOWARD, ARMEN KIRAKOSIAN, MIRZAFER ABATCHEV
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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