CORROSION-RESISTANT CMP CONDITIONING TOOLS AND METHODS FOR MAKING AND USING SAME
An abrasive tool for conditioning CMP pads includes abrasive grains coupled to a substrate through a metal bond and a coating, e.g., a fluorine-doped nanocomposite coating. The abrasive grains can be arranged in a self-avoiding random distribution. In one implementation, an abrasive tool includes a...
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creator | RAMANATH, SRINIVASAN VEDANTHAM, RAMANUJAM SCHULZ, ERIC, M WU, JIANHUI DINH-NGOC, CHARLES HWANG, TAEWOOK PUTHANANGADY, THOMAS |
description | An abrasive tool for conditioning CMP pads includes abrasive grains coupled to a substrate through a metal bond and a coating, e.g., a fluorine-doped nanocomposite coating. The abrasive grains can be arranged in a self-avoiding random distribution. In one implementation, an abrasive tool includes a coated plate and a coated abrasive article that has two abrading surfaces. Other implementations related to a process for producing an abrasive tool that includes a coating at one or more of its surfaces. Also described are methods for dressing a CMP pad. |
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title | CORROSION-RESISTANT CMP CONDITIONING TOOLS AND METHODS FOR MAKING AND USING SAME |
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