PARALLELISM ADJUSTING MECHANISM OF PROBE CARD

PARALLELISM ADJUSTING MECHANISM OF PROBE CARD

A parallelism adjusting mechanism of a probe card is provided. The parallelism adjusting mechanism can bring probes held by a probe card into uniform contact with a wafer even if a parallelism between a mounting reference surface for the probe card and the wafer as a test object10 is lost. To achiev...

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Hauptverfasser: NAKAYAMA, HIROSHI, AKAO, TAKASHI, INUMA, TSUYOSHI, YAMADA, YOSHIO, NAGAYA, MITSUHIRO
Format: Patent
Sprache:eng
Schlagworte:
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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creator NAKAYAMA, HIROSHI
AKAO, TAKASHI
INUMA, TSUYOSHI
YAMADA, YOSHIO
NAGAYA, MITSUHIRO
description A parallelism adjusting mechanism of a probe card is provided. The parallelism adjusting mechanism can bring probes held by a probe card into uniform contact with a wafer even if a parallelism between a mounting reference surface for the probe card and the wafer as a test object10 is lost. To achieve this purpose, specifically, to adjust a parallelism of a probe card (101) that holds a plurality of probes (1) for electrically connecting a wafer (31) as a test object and a circuitry for generating a signal for a test with respect to the wafer (31), adjusting screws (22)15 as at least part of an inclination changing unit are provided. The inclination changing unit changes a degree of inclination of the probe card (101) with respect to a mounting reference surface (Si) of a prober (202) for mounting the probe card (101) thereon. FIG. 1
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subjects MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
title PARALLELISM ADJUSTING MECHANISM OF PROBE CARD
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