SHOWERHEAD FOR A GAS SUPPLY APPARATUS

A showerhead for a gas supply apparatus. This showerhead includes a body having a distribution plate on one side and at least one gas chamber contained within the body. A plurality of holes extend normally from an outer surface of the distribution plate to the chamber. Furthermore, at least a portio...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: DEDONTNEY JAY BRIAN, BAILEY ROBERTS JEFFREY
Format: Patent
Sprache:eng
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