HIGH FLOW GACL3 DELIVERY

HIGH FLOW GACL3 DELIVERY

The present invention is an apparatus for deliverying high purity gallium trichioride in the vapor phase to a gallium nitride reactor, comprising; a source of carrier gas at an elevated pressure; a purifier to remove moisture from the carrier gas; a heater capable of heating the carrier gas to at le...

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Hauptverfasser: BIRTCHER CHARLES MICHAEL, STEIDL THOMAS ANDREW, SENECAL LEE ARTHUR, CLARK ROBERT DANIEL
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Sprache:eng
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creator BIRTCHER CHARLES MICHAEL
STEIDL THOMAS ANDREW
SENECAL LEE ARTHUR
CLARK ROBERT DANIEL
description The present invention is an apparatus for deliverying high purity gallium trichioride in the vapor phase to a gallium nitride reactor, comprising; a source of carrier gas at an elevated pressure; a purifier to remove moisture from the carrier gas; a heater capable of heating the carrier gas to at least 802C; a container having a supply of gallium trichioride, a valve controlled inlet for the carrier gas having a dip tube with an outlet below the level of the gallium trichloride, a valve controlled outlet for removing the carrier gas and entrained gallium trichloride; a heater capable of heating sufficient to melt the gallium trichioride; a delivery line connected to the valve controlled outlet for carrying the entrained gallium trichloride to a reaction zone for gallium nitride. A process is also described for the apparatus.
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title HIGH FLOW GACL3 DELIVERY
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