A VACUUM PUMP COMPRISING A RELIEF VALVE AND A METHOD OF ASSEMBLY OF THE RELIEF VALVE
A multiple stage rotary vacuum pump comprising: a stator comprising multiple pumping stages; at least one inter-stage divider separating two adjacent pumping stages; the at least one inter-stage divider comprising two walls defining a cavity therebetween, an upstream wall bounding an upstream pumpin...
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Sprache: | eng |
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Zusammenfassung: | A multiple stage rotary vacuum pump comprising: a stator comprising multiple pumping stages; at least one inter-stage divider separating two adjacent pumping stages; the at least one inter-stage divider comprising two walls defining a cavity therebetween, an upstream wall bounding an upstream pumping stage and a downstream wall bounding a downstream pumping stage of the two adjacent pumping stages. The cavity comprising at least a portion of a pressure relief fluid flow path, the pressure relief fluid flow path providing a path from an outlet portion of the upstream stage towards an inlet portion of the upstream stage or towards an exhaust, the pressure relief fluid flow path comprising an orifice, the orifice comprising a valve seat; and a pressure relief valve configured to move between a compressed and an elongated state, the pressure relief valve sealing the orifice when in the elongated state and being configured to move to the compressed state such that the orifice is not obstructed, in response to pressure in the upstream stage rising above a predetermined value. |
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