SHOWERHEAD FACEPLATE HAVING FLOW APERTURES CONFIGURED FOR HOLLOW CATHODE DISCHARGE SUPPRESSION

SHOWERHEAD FACEPLATE HAVING FLOW APERTURES CONFIGURED FOR HOLLOW CATHODE DISCHARGE SUPPRESSION

A faceplate of a showerhead has a bottom side that faces a plasma generation region and a top side that faces a plenum into which a process gas is supplied during operation of a substrate processing system. The faceplate includes apertures formed through the bottom side and openings formed through t...

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Hauptverfasser: BREILING, Patrick G, KAMP, David William, DONNELLY, Sean M, SELEP, Michael John, LEESER, Karl Frederick, THOMAS, Timothy Scott
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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creator BREILING, Patrick G
KAMP, David William
DONNELLY, Sean M
SELEP, Michael John
LEESER, Karl Frederick
THOMAS, Timothy Scott
description A faceplate of a showerhead has a bottom side that faces a plasma generation region and a top side that faces a plenum into which a process gas is supplied during operation of a substrate processing system. The faceplate includes apertures formed through the bottom side and openings formed through the top side. Each of the apertures is formed to extend through a portion of an overall thickness of the faceplate to intersect with at least one of the openings to form a corresponding flow path for process gas through the faceplate. Each of the apertures has a cross-section that has a hollow cathode discharge suppression dimension in at least one direction. Each of the openings has a cross-section that has a smallest cross-sectional dimension that is greater than the hollow cathode discharge suppression dimension.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
title SHOWERHEAD FACEPLATE HAVING FLOW APERTURES CONFIGURED FOR HOLLOW CATHODE DISCHARGE SUPPRESSION
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