REAL-TIME CONTROL OF TEMPERATURE IN A PLASMA CHAMBER

Systems and methods for real-time control of temperature within a plasma chamber are described. One of the methods includes sensing a voltage in real time of a rail that is coupled to a voltage source. The voltage source supplies a voltage to multiple heater elements of the plasma chamber. The volta...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	JING, Changyou
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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