SUBSTRATE CARRIER AND SUBSTRATE CARRIER STACK

A substrate carrier stack includes substrate carriers which are stacked or stackable on each other and carry substrates within an inner accommodation space of the substrate carrier stack. The substrate carrier stack includes at least one first purging channel and at least one second purging channel,...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SCHOBER, Thomas, RAHRBACH, Bernd, FIDDES, John, WOHANKA, Christian, FENNER, Yves, DOVIDS, Gerhard
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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