ANALYZING AND UTILIZING LANDSCAPES

Methods are provided for deriving a partially continuous dependency of metrology metric(s) on recipe parameter(s), analyzing the derived dependency, determining a metrology recipe according to the analysis, and conducting metrology measurement(s) according to the determined recipe. The dependency ma...

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Bibliographische Detailangaben

Hauptverfasser:	MARCIANO, Tal, COOPER, Moshe, SULIMARSKI, Roee, FELER, Yoel, ZHAO, Zeng, BACHAR, Ohad, CARMEL, Nadav, ADAM, Ido, SELLA, Noga, ASHWAL, Eltsafon, LINDENFELD, Za'ev, EFRATY, Boris, KANDEL, Daniel, BRINGOLTZ, Barak, ZAHARAN, Ofer, SALTOUN, Lilach, GUREVICH, Evgeni, LEVIANT, Tom, HANDELMAN, Amir, KAMINSKY, Oded, YAZIV, Tal, AMIR, Nuriel, MANASSEN, Amnon
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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