SOLID SOURCE PRECURSOR VESSEL

The present disclosure is generally directed to a solid source precursor delivery system. More specifically, the present disclosure is directed to a solid source precursor vessel that can be utilized to vaporize a supply of solid precursor stored within the vessel. The disclosed source vessel utiliz...

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Bibliographische Detailangaben

Hauptverfasser:	BAKKE, Jonathan Robert, SHERO, Eric James, KIMTEE, Ankit, HUANG, Jianqiu, BIYANI, Sudhanshu
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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