Substrate Rotation Device, Substrate Cleaning Device, Substrate Processing Device, And Control Method For Substrate Rotation Device

An advanced substrate rotation device is provided. A substrate rotation device is disclosed. The substrate rotation device includes an outer cylinder, an inner cylinder positioned inside the outer cylinder, a motor for rotating the inner cylinder, a magnetic bearing for magnetically levitating the i...

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Hauptverfasser:	SATOH, Ichiju, BARADA, Toshimitsu
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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