PHOTORESIST STRIPPER

PHOTORESIST STRIPPER Improved stripper solutions for removing photoresists from substrates are provided that typically have flash points above about 0 0 and high loading capacities. The stripper solutions comprise diethylene glycol butyl ether, quaternary ammonium hydroxide, and an alkanolamine havi...

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Bibliographische Detailangaben
Hauptverfasser: MICHAEL PHENIS, Richie Dalton Peters, YUANMEI CAO
Format: Patent
Sprache:eng
Online-Zugang:Volltext bestellen
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