POLISHING APPARATUS AND POLISHING METHOD

POLISHING APPARATUS AND POLISHING METHOD

POLISHING APPARATUS AND POLISHING METHOD Provided is a polishing apparatus and polishing method which can preferably adjust a temperature of a surface of a polishing pad. A polishing apparatus includes: a polishing table configured to be rotatable, and to support the polishing pad; a substrate confi...

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Hauptverfasser: Hiroshi SOTOZAKI, Tadakazu SONE
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Sprache:eng
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creator Hiroshi SOTOZAKI
Tadakazu SONE
description POLISHING APPARATUS AND POLISHING METHOD Provided is a polishing apparatus and polishing method which can preferably adjust a temperature of a surface of a polishing pad. A polishing apparatus includes: a polishing table configured to be rotatable, and to support the polishing pad; a substrate configured to hold an object to be polished, and to press the object to be polished against the polishing pad; a polishing liquid supplying portion configured to supply a polishing liquid to a polishing surface; a polishing liquid removing portion configured to remove the polishing liquid from the polishing surface; and a temperature adjuster configured to adjust a temperature of the polishing surface. In a rotating direction of the polishing table, the polishing liquid supplying portion, a polishing region where the object to be polished is pressed against the polishing surface by the substrate, the polishing liquid removing portion, and the temperature adjuster are disposed in this order. Selected Drawings: Fig. 2
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title POLISHING APPARATUS AND POLISHING METHOD
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