DUAL MODE CHAMBER FOR PROCESSING WAFER-SHAPED ARTICLES

DUAL MODE CHAMBER FOR PROCESSING WAFER-SHAPED ARTICLES

An apparatus for processing a wafer shaped article comprises a rotary chuck for holding a wafer shaped article and rotating the wafer shaped article about an axis of rotation. A chamber surrounds and encloses the rotary chuck, the chamber comprising an upper opening. A lid is mounted externally of t...

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Hauptverfasser: KARL-HEINZ HOHENWARTER, MICHAEL PUGGL, MILAN PLISKA, REINHOLD SCHWARZENBACHER
Format: Patent
Sprache:eng
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creator KARL-HEINZ HOHENWARTER
MICHAEL PUGGL
MILAN PLISKA
REINHOLD SCHWARZENBACHER
description An apparatus for processing a wafer shaped article comprises a rotary chuck for holding a wafer shaped article and rotating the wafer shaped article about an axis of rotation. A chamber surrounds and encloses the rotary chuck, the chamber comprising an upper opening. A lid is mounted externally of the chamber so as to be movable between a closed position in which the lid seals the upper opening, and an open position in which the lid uncovers the upper opening and is displaced laterally therefrom. The chamber is openable separately from the lid so as to permit a wafer shaped article to be introduced into the chamber in a direction perpendicular to the axis of rotation.
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fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_SG10201605220RA</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>SG10201605220RA</sourcerecordid><originalsourceid>FETCH-epo_espacenet_SG10201605220RA3</originalsourceid><addsrcrecordid>eNrjZDBzCXX0UfD1d3FVcPZw9HVyDVJw8w9SCAjyd3YNDvb0c1cId3RzDdIN9nAMcHVRcAwK8XT2cQ3mYWBNS8wpTuWF0twMKm6uIc4euqkF-fGpxQWJyal5qSXxwe6GBkYGhmYGpkZGBkGOxkQqAwDhIykO</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>DUAL MODE CHAMBER FOR PROCESSING WAFER-SHAPED ARTICLES</title><source>esp@cenet</source><creator>KARL-HEINZ HOHENWARTER ; MICHAEL PUGGL ; MILAN PLISKA ; REINHOLD SCHWARZENBACHER</creator><creatorcontrib>KARL-HEINZ HOHENWARTER ; MICHAEL PUGGL ; MILAN PLISKA ; REINHOLD SCHWARZENBACHER</creatorcontrib><description>An apparatus for processing a wafer shaped article comprises a rotary chuck for holding a wafer shaped article and rotating the wafer shaped article about an axis of rotation. A chamber surrounds and encloses the rotary chuck, the chamber comprising an upper opening. A lid is mounted externally of the chamber so as to be movable between a closed position in which the lid seals the upper opening, and an open position in which the lid uncovers the upper opening and is displaced laterally therefrom. The chamber is openable separately from the lid so as to permit a wafer shaped article to be introduced into the chamber in a direction perpendicular to the axis of rotation.</description><language>eng</language><creationdate>2017</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20170127&amp;DB=EPODOC&amp;CC=SG&amp;NR=10201605220RA$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25544,76293</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20170127&amp;DB=EPODOC&amp;CC=SG&amp;NR=10201605220RA$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>KARL-HEINZ HOHENWARTER</creatorcontrib><creatorcontrib>MICHAEL PUGGL</creatorcontrib><creatorcontrib>MILAN PLISKA</creatorcontrib><creatorcontrib>REINHOLD SCHWARZENBACHER</creatorcontrib><title>DUAL MODE CHAMBER FOR PROCESSING WAFER-SHAPED ARTICLES</title><description>An apparatus for processing a wafer shaped article comprises a rotary chuck for holding a wafer shaped article and rotating the wafer shaped article about an axis of rotation. A chamber surrounds and encloses the rotary chuck, the chamber comprising an upper opening. A lid is mounted externally of the chamber so as to be movable between a closed position in which the lid seals the upper opening, and an open position in which the lid uncovers the upper opening and is displaced laterally therefrom. The chamber is openable separately from the lid so as to permit a wafer shaped article to be introduced into the chamber in a direction perpendicular to the axis of rotation.</description><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2017</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZDBzCXX0UfD1d3FVcPZw9HVyDVJw8w9SCAjyd3YNDvb0c1cId3RzDdIN9nAMcHVRcAwK8XT2cQ3mYWBNS8wpTuWF0twMKm6uIc4euqkF-fGpxQWJyal5qSXxwe6GBkYGhmYGpkZGBkGOxkQqAwDhIykO</recordid><startdate>20170127</startdate><enddate>20170127</enddate><creator>KARL-HEINZ HOHENWARTER</creator><creator>MICHAEL PUGGL</creator><creator>MILAN PLISKA</creator><creator>REINHOLD SCHWARZENBACHER</creator><scope>EVB</scope></search><sort><creationdate>20170127</creationdate><title>DUAL MODE CHAMBER FOR PROCESSING WAFER-SHAPED ARTICLES</title><author>KARL-HEINZ HOHENWARTER ; MICHAEL PUGGL ; MILAN PLISKA ; REINHOLD SCHWARZENBACHER</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_SG10201605220RA3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2017</creationdate><toplevel>online_resources</toplevel><creatorcontrib>KARL-HEINZ HOHENWARTER</creatorcontrib><creatorcontrib>MICHAEL PUGGL</creatorcontrib><creatorcontrib>MILAN PLISKA</creatorcontrib><creatorcontrib>REINHOLD SCHWARZENBACHER</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>KARL-HEINZ HOHENWARTER</au><au>MICHAEL PUGGL</au><au>MILAN PLISKA</au><au>REINHOLD SCHWARZENBACHER</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>DUAL MODE CHAMBER FOR PROCESSING WAFER-SHAPED ARTICLES</title><date>2017-01-27</date><risdate>2017</risdate><abstract>An apparatus for processing a wafer shaped article comprises a rotary chuck for holding a wafer shaped article and rotating the wafer shaped article about an axis of rotation. A chamber surrounds and encloses the rotary chuck, the chamber comprising an upper opening. A lid is mounted externally of the chamber so as to be movable between a closed position in which the lid seals the upper opening, and an open position in which the lid uncovers the upper opening and is displaced laterally therefrom. The chamber is openable separately from the lid so as to permit a wafer shaped article to be introduced into the chamber in a direction perpendicular to the axis of rotation.</abstract><oa>free_for_read</oa></addata></record>
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title DUAL MODE CHAMBER FOR PROCESSING WAFER-SHAPED ARTICLES
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-28T03%3A59%3A27IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=KARL-HEINZ%20HOHENWARTER&rft.date=2017-01-27&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3ESG10201605220RA%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true