FILL ON DEMAND AMPOULE REFILL

The invention relates to fill on demand ampoule refill. Methods and apparatus for use of a fill on demand ampoule are disclosed. The fill on demand ampoule may refill an ampoule with precursor concurrent with the performance of other deposition processes. The fill on demand may keep the level of pre...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NGUYEN, TUAN, PETRAGLIA, JENNIFER L, PASQUALE, FRANK L, LAVOIE, ADRIEN, CHANDRASEKHARAN, RAMESH, RANGANATHAN, EASHWAR, SWAMINATHAN, SHANKAR, BALDASSERONI, CHLOE
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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