Method For Dressing Polishing Pads

Method For Dressing Polishing Pads

A method dresses one polishing cloth or two polishing pads simultaneously, in which a polishing cloth has been applied to a polishing plate, with at least one dresser (4), which is equipped with at least one dressing element (8), this at least one dressing element (8) being in contact with the at le...

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Hauptverfasser: SCHNAPPAUF, MARKUS, OLBRICH, TORSTEN, DUTSCHKE, VLADIMIR, MISTUR, LESZEK
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Sprache:eng
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creator SCHNAPPAUF, MARKUS
OLBRICH, TORSTEN
DUTSCHKE, VLADIMIR
MISTUR, LESZEK
description A method dresses one polishing cloth or two polishing pads simultaneously, in which a polishing cloth has been applied to a polishing plate, with at least one dresser (4), which is equipped with at least one dressing element (8), this at least one dressing element (8) being in contact with the at least one polishing cloth (11, 12) to be dressed, wherein the at least one polishing plate (21, 22) is rotated with a relative rotational speed and the at least one dresser (4) is rotated with a relative rotational speed and at least two different combinations of directions of rotation of the two pairs of polishing plates (21, 22) and pin wheels (31, 32) are executed during the simultaneous dressing of two polishing pads (11, 12) or during the dressing of one polishing cloth (11) of the polishing plate (21) and of the at least one dresser (4).
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title Method For Dressing Polishing Pads
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