MEMS CHIP WAVEGUIDE TECHNOLOGY WITH PLANAR RF TRANSMISSION LINE ACCESS
The invention provides a waveguide system device realized as a MEMS chip with wafer level integrated planar RF transmission lines enabling the signal transition between the waveguide structure and the planar RF transmission line. There is also provided a micro-mechanical and/or micro-electronics(MEM...
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| creator | Tomas Bauer |
| description | The invention provides a waveguide system device realized as a MEMS chip with wafer level integrated planar RF transmission lines enabling the signal transition between the waveguide structure and the planar RF transmission line. There is also provided a micro-mechanical and/or micro-electronics(MEMS and/or IC) approach to routing of signal lines and integrating additional electrical or mechanical functions within the chip. In a second aspect the invention provides a general method of making a waveguide structure with planar RF transmission line access of the signal into the waveguide cavity structure as well as enabling on-chip electrical signal routing and integration of additional electrical or mechanical functions. |
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In a second aspect the invention provides a general method of making a waveguide structure with planar RF transmission line access of the signal into the waveguide cavity structure as well as enabling on-chip electrical signal routing and integration of additional electrical or mechanical functions.</description><language>eng ; swe</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRICITY ; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES ; MICROSTRUCTURAL TECHNOLOGY ; PERFORMING OPERATIONS ; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS ; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE ; TRANSPORTING ; WAVEGUIDES</subject><creationdate>2016</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20160820&DB=EPODOC&CC=SE&NR=1530028A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20160820&DB=EPODOC&CC=SE&NR=1530028A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Tomas Bauer</creatorcontrib><title>MEMS CHIP WAVEGUIDE TECHNOLOGY WITH PLANAR RF TRANSMISSION LINE ACCESS</title><description>The invention provides a waveguide system device realized as a MEMS chip with wafer level integrated planar RF transmission lines enabling the signal transition between the waveguide structure and the planar RF transmission line. 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| language | eng ; swe |
| recordid | cdi_epo_espacenet_SE1530028A1 |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRICITY MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE TRANSPORTING WAVEGUIDES |
| title | MEMS CHIP WAVEGUIDE TECHNOLOGY WITH PLANAR RF TRANSMISSION LINE ACCESS |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-31T21%3A26%3A04IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=Tomas%20Bauer&rft.date=2016-08-20&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3ESE1530028A1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |