DEVICE FOR CONTROLLED PRODUCTION OF POROUS OXIDES OF SEMICONDUCTORS IN SITU

FIELD: manufacturing technology; electrical engineering.SUBSTANCE: invention relates to production of porous anode oxides of semiconductors and to study semiconductor materials during their formation (i.e., in situ). Technical problem lies in the possibility of obtaining semiconductor nanostructured...

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Hauptverfasser: Galushka Viktor Vladimirovich, Terin Denis Vladimirovich, Lomovtseva Kseniia Sergeevna, Iagudin Ildar Tagirovich, Kondrateva Elizaveta Vadimovna
Format: Patent
Sprache:eng ; rus
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