METHOD OF MANUFACTURING OF A FIELD EMISSION ELEMENT

FIELD: electrical engineering.SUBSTANCE: invention relates to electronic engineering, in particular to field emission elements containing carbon nanotubes used as cathodes, and also to a method for manufacturing them. Method of manufacturing a field emission element includes formation of a dielectri...

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Hauptverfasser: Zhivikhin Aleksej Vasilevich, Saurov Aleksandr Nikolaevich, Kozlov Sergej Nikolaevich, Pavlov Aleksandr Aleksandrovich, Kitsyuk Evgenij Pavlovich
Format: Patent
Sprache:eng ; rus
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