METHOD OF AMORPHOUS OXIDE OF ALUMINUM COATING BY REACTIVE EVAPORATION OF ALUMINUM IN LOW PRESSURE DISCHARGE

FIELD: manufacturing technology.SUBSTANCE: invention relates to the field of coating of amorphous aluminum oxide on metal products and dielectrics and can be used in various fields of science and technology. Method for coating an amorphous alumina with reactive evaporation of aluminum is carried out...

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Hauptverfasser: Gavrilov Nikolaj Vasilevich, Tretnikov Petr Vasilevich, Kamenetskikh Aleksandr Sergeevich
Format: Patent
Sprache:eng ; rus
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