SEMICONDUCTOR PRESSURE CONVERTER

FIELD: instrumentation.SUBSTANCE: semiconductor pressure converter comprises a membrane with a thickened peripheral base. The membrane has thickness equal to thickness of strain gauges formed on the dielectric layer fixed onto the membrane. Strain gauges are combined using conductors having metallis...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TAREEVA JULIJA ALEKSANDROVNA, VOLKOV VADIM SERGEEVICH, GURIN SERGEJ ALEKSANDROVICH, EVDOKIMOV SERGEJ PAVLOVICH, BARINOV IL'JA NIKOLAEVICH
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
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