METHOD OF ELECTROCHEMICAL X-RAY CONTACTLESS LITHOGRAPHY

FIELD: nanotechnology.SUBSTANCE: invention relates to the field of nanotechnology, describes a method of electrochemical surface structuring of materials and can be used in manufacture of microelectronic elements, single-layer and multilayer printed boards, optical elements, and other thin film stru...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SAPOLETOVA NINA ALEKSANDROVNA, PETUKHOV DMITRIJ IGOREVICH, NAPOL'SKIJ KIRILL SERGEEVICH, ELISEEV ANDREJ ANATOL'EVICH, SNIGIREVA IRAIDA IVANOVNA, SNIGIREV ANATOLIJ ALEKSANDROVICH
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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