CONVERTER OF VACUUM ULTRAVIOLET RADIATION INTO RADIATION OF VISIBLE RANGE IN FORM OF AMORPHOUS SILICON OXIDE SiOFILM ON SILICON SUBSTRATE

FIELD: chemistry.SUBSTANCE: invention relates to luminescent materials - converters of vacuum ultraviolet radiation into radiation of a visible range, made in the form of an amorphous silicon oxide SiOfilm on a silicon substrate, intended for the creation of functional elements of photonic devices o...

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Hauptverfasser: ZATSEPIN ANATOLIJ FEDOROVICH, BUNTOV EVGENIJ ALEKSANDROVICH, KORTOV VSEVOLOD SEMENOVICH, PUSTOVAROV VLADIMIR ALEKSEEVICH
Format: Patent
Sprache:eng ; rus
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