CONVERTER OF VACUUM ULTRAVIOLET RADIATION INTO RADIATION OF VISIBLE RANGE IN FORM OF AMORPHOUS SILICON OXIDE SiOFILM ON SILICON SUBSTRATE
FIELD: chemistry.SUBSTANCE: invention relates to luminescent materials - converters of vacuum ultraviolet radiation into radiation of a visible range, made in the form of an amorphous silicon oxide SiOfilm on a silicon substrate, intended for the creation of functional elements of photonic devices o...
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