METHOD OF MAKING COMPOSITE CATHODE

FIELD: process engineering.SUBSTANCE: invention relates to welding and may be used for, for example, for making composite cathode from refractory materials for vacuum deposition of fine films in machine building, microelectronics, instrument making, etc. Cathode contact surfaces are prepared and sol...

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Hauptverfasser: KORKINA MARGARITA ALEKSANDROVNA, FARMAKOVSKIJ BORIS VLADIMIROVICH, BURKANOVA ELENA JUR'EVNA, SAMODELKIN EVGENIJ ALEKSANDROVICH, VASIL'EV ALEKSEJ FILIPPOVICH, GERASHCHENKOV DMITRIJ ANATOL'EVICH
Format: Patent
Sprache:eng ; rus
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