METHOD OF PRODUCING TITANIUM NITRIDE NANOPOWDERS

FIELD: process engineering. ^ SUBSTANCE: invention relates to chemical industry and may be used for production of nano-sized powders by plasma chemical processes. Proposed method comprises feeding precursor into evaporation reactor chamber, treating it in nitrogen plasma flow, cooling in nitrogen fl...

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Hauptverfasser: GRIGOROV IGOR' GEORGIEVICH, ZAJNULIN JURIJ GALIULOVICH, DOBRINSKIJ EHDUARD KONSTANTINOVICH, MISHARINA IRINA VIKTOROVNA, MALASHIN STANISLAV IVANOVICH, ERMAKOVA OL'GA NIKOLAEVNA, ERMAKOV ALEKSEJ NIKOLAEVICH
Format: Patent
Sprache:eng ; rus
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